| 型號 | CS200 |
| 類號 | A | C | D |
| 流量規(guī)格(N?) | (0~5,10,20,30,50,100,200,300,500)SCCM(0~1,2,3,5,10,20,30,50)SLM | (0~2,3,5,10,20,30,50,100,200,300,500)SCCM(0~1,2,3,5,10,20,30)SLM |
| 準(zhǔn)確度 | ±1.0%S.P.(≥35%F.S.); ±0.35%F.S.(<35%F.S.) |
| 線性 | ±0.5% F.S. |
| 重 復(fù) 精 度 | ±0.2% F.S. |
| 響 應(yīng) 時 間 | ≤ 1 sec | ≤0.8 sec(SEMI E17-0600) | ≤1 sec |
| 閥類型 | Normally Closed or Normally Open | N/A | Normally Closed or Normally Open | N/A | Normally Closed or Normally Open | N/A |
| 工作壓差范圍 | (0.05~0.35)MPa(≤10SLM)
(0.1~0.35)MPa10SLM
(0.2~0.45)MPa30SLM | <0.02MPa | (0.05~0.35) MPa(≤10SLM)
(0.1~0.35) MPa(>10SLM) | <0.02MPa | (0.05~0.35)MPa(≤10SLM)
(0.1~0.35)MPa(>10SLM) | <0.02MPa |
| 溫 度 系 數(shù) | Zero:≤±0.05%F.S./C;
Span:≤±0.1%F.S./℃ Flow≤30SLM
≤±0.2%F.S./℃ Flow>30SLM | Zero:≤±0.02% F.S./℃;
Span:≤±0.05%F.S./℃ |
| 工作壓力 | 0.45MPa |
| 耐壓 | 3MPa |
| 漏率 | 1×10?1? Pa·m3/sec He(1×10?atm· cc/sec He) | 1×10?11 Pa·m3/sec He(1×10?1?atm· cc/sec He) |
| 密 封 材 料 | Viton | Metal | Metal |
| 表面化學(xué)成分 | ———— | Cr/ Fe ratio>2.0; CrO thickness >20 Angstroms | ———— |
| 表面粗糙度 | 25 μinch Ra | 10 uinch Ra | 25 μinch Ra |
| 工作環(huán)境溫度 | (5~45)℃ | (0~50)℃ |
| 輸 入 信 號 | Digital: RS485 or DeviceNet or ProfiBus or EtherCAT;
Analog:(0~5)VDC
or(4~20)mA or(0~20)mA | N/A | Digital: RS485 or DeviceNet
or ProfiBusTK or EtherCAT ;
Analog:(0~5)VDC
or(4~20)mA or(0~20)mA | N/A | Digital: RS485 or DeviceNet"
or ProfiBus or EtherCAT;
Analog:(0~5)VDC
or(4~20)mA or(0~20)mA | N/A |
| 輸 出 信 號 | Digital: RS485 or DeviceNet or ProfiBus or EtherCAT male; Analog:(0~5)VDC or(4~20)mA or (0~20)mA |
| 電源 | ±8~±16 VDC or+14~+28 VDC or+20.4~+26.4 VDC (EtherCAT) |
| 電 氣 連 接 | D sub 9 pin s male;D sub 15 pin s male; DeviceNet; ProfiBus or EtherCAT; Analog |
| 標(biāo)準(zhǔn)接頭形式 | VCR1/4"M;VCO1/4"M;A-sael;
Compression Fittingφ10; Compression Fittingφ6;
Compression Fitting 3/8"; Compression Fittingl/4";
Compression Fittingl/8"; Compression Fittingφ3;
φ6(inner)×1hose;φ5(inner)×1.5hose;φ4(inner)×1hose | VCR1/4"M;
Compression Fittingφ6;
Compression Fittingφ3;
Compression Fittingl/4";
W-seal;C-seal |
| 重量 | 1kg | 0.8kg | 1.2kg | 1kg | 1.2kg | 1kg |
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